2011 JSPE Spring Conference
Session ID : N16
Conference information
Host: The Japan Society for Precision Engineering
Formation of three-dimensional shape in silicon surface by photo-etching with N-fluoropyridinium salts
*Masaki Otani, Junichi Uchikoshi, Kentaro Tsukamoto, Takabumi Nagai, Kenji Adachi, Kentaro Kawai, Kenta Arima, Mizuho Morita
Author information
Keywords:
N-fluoropyridinium salt,
photo-etching
Details
