2013 JSPE Autumn Conference
Session ID : D19
Conference information
Host: The Japan Society for Precision Engineering
Surface Acoustic Wave Linear Motor Using Segment-Structured Diamond-Like Carbon Films on Contact Surface
9th Report Segment Shape Control Using the Sacrifice Layer and S-DLC Films
*Kosuke Nakatani, Masaya Takasaki, Atsuyuki Takarada, Naoto Ohtake, Takeshi Mizuno
Author information
Keywords:
Surface Acoustic Wave Linear Motor,
Diamond-Like Carbon,
Segment-Structure,
Sacrifice Layer,
Shape Control
Details
