Proceedings of JSPE Semestrial Meeting
2013 JSPE Autumn Conference
Session ID : F02
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Host: The Japan Society for Precision Engineering

Investigation of Phenomenon in Removal Processing of TCO Film by ns Pulsed Fiber Laser
*Takehito Yokoyama, Yasuhiro Okamoto, Akira Okada, Shin-ichi Nakashiba, Tomokazu Sakagawa
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Keywords: TCO film, ns Pulsed fiber laser, Scribing, Intensity distribution, High-speed observation
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Abstract
TCO (Transparent Conductive Oxide) film has widely been used in many industrial fields because of its excellent conductive characteristics and the transparency at the visible wavelength. However, it is required to perform the processing without any damages to other thin layers except for a removal object and to apply for various kinds of TCO film. The phenomenon in scribing ZnO film was investigated by the observation of scribed groove and removal processing.
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© 2013 The Japan Society for Precision Engineering
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