Proceedings of JSPE Semestrial Meeting
2013 JSPE Autumn Conference
Session ID : J03
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Host: The Japan Society for Precision Engineering

Template releasing process in Nanoimprint lithography
Approach for low defective process
*Yoshihiko Hirai, Takuya Kitagawa, Takahiro Shiotsu, Hiroaki Kawata
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Keywords: nanoimprint, template releasing
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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