Proceedings of JSPE Semestrial Meeting
2013 JSPE Autumn Conference
Session ID : J04
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Host: The Japan Society for Precision Engineering

Fabrication of self-standing membrane filter by imprint process
*Hiroaki Kawata, Yoshihiko Hirai, Minoru Mamuro
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Keywords: nanoimprint, membrane filter, self-standing
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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