Proceedings of JSPE Semestrial Meeting
2013 JSPE Autumn Conference
Session ID : L61
Conference information

Development of the local polishing technique in the solution environment-Investigation of the polishing characteristics of SiC substrate-
*Shin NagaeAkihisa KubotaMutsumi Touge
Author information
Keywords: SiC, local polishing
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Abstract
[in Japanese]
Content from these authors
© 2013 The Japan Society for Precision Engineering
Previous article Next article
feedback
Top