Proceedings of JSPE Semestrial Meeting
2013 JSPE Autumn Conference
Session ID : L62
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Host: The Japan Society for Precision Engineering

Development of ultraviolet assisted polishing -Investigation of the polishing characteristics of SiC substrate-
*Takahiro Takita, Akihisa Kubota, Mutsumi Touge
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Keywords: SiC, Polishing, Ultraviolet
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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