Proceedings of JSPE Semestrial Meeting
2013 JSPE Autumn Conference
Session ID : Q07
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Host: The Japan Society for Precision Engineering

Research of agent-assisted oxidation polishing of single-crystal silicon carbide II
*Wataru Omori, Makoto Sato, Maiko Takahashi
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Keywords: polishing, chemical mechanical polishing, silicon carbide, oxidizing agent
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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