2013 JSPE Spring Conference
Session ID : C25
Conference information
Host: The Japan Society for Precision Engineering
A Modeling of Charge-Drift in MEMS Mirrors
*Mitsumasa Nakajima, Kei Kuwabara, Takako Ishihara, Tomomi Sakata, Naru Nemoto, Joji Yamaguchi, Shingo Uchiyama, Tsuyoshi Yamamoto, Yoshito Jin
Author information
Details
