Proceedings of JSPE Semestrial Meeting
2013 JSPE Spring Conference
Session ID : C38
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Host: The Japan Society for Precision Engineering

Basic study of improvement mechanism for polishing rate using controlled slurry under AC electric field -2nd report-
*Takayuki Kusumi, Akihiro Arai, Yasuhiro Sato, Yoichi Akagami, Noritsugu Umehara
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Keywords: AC electric field, polishing, Abrasives
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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