Proceedings of JSPE Semestrial Meeting
2013 JSPE Spring Conference
Session ID : C39
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Host: The Japan Society for Precision Engineering

Development of high efficiency polishing technique for 6inch sapphire wafer using AC electric field
*Shogo Chiba, Masuhiro Tsuchida, Yasuharu Kemuriyama, Tatsuo Takahashi, Ryuta Nakamura, Takayuki Kusumi, Yoichi Akagami
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Keywords: 6 inch Sapphire Wafer, Electric Field, Diamond Abrasive grain, polish
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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