2013 JSPE Spring Conference
Session ID : J13
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Host: The Japan Society for Precision Engineering
Study on CMP Micro Patterned pad Fabricated by MEMS Technology
Fabrication of Micro Patterned Pad using Ni plated mold
*Shintaro Isono, Keisuke Suzuki, Takahiro Ito, Panart Khajornrungruang, Masakazu Urabe, Keiichi Kimura, Yasunori Tashiro, Takahiro Oniki
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