Proceedings of JSPE Semestrial Meeting
2013 JSPE Spring Conference
Session ID : J24
Conference information

Host: The Japan Society for Precision Engineering

[title in Japanese]
*Tsutomu Yamazaki, Toshiro Doi, Kiyoshi Seshimo, Masanori Ohtsubo, Keiichi Tsukamoto, Bunyuu Ki, Toyohiro Wakabayashi, Haruo Sumizawa
Author information
Keywords: CMP, Difficulty processability material, green device, SiC, metal plate
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (647K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2013 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top