Proceedings of JSPE Semestrial Meeting
2013 JSPE Spring Conference
Session ID : J25
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Host: The Japan Society for Precision Engineering

[title in Japanese]
*Kiyoshi Seshimo, Toshiro Doi, Tsutomu Yamazaki, Thi Ngoc Le Lien, Masanori Ohtsubo, Hiroshi Endo, Yoko Matsunaga, Zhang Ji
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Keywords: CMP, Difficulty processability material, green device, Preston′s equation
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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