Proceedings of JSPE Semestrial Meeting
2013 JSPE Spring Conference
Session ID : J44
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Host: The Japan Society for Precision Engineering

Glass polishing characteristics from physical properties of polishing pads
*Hideyo Togashi, Takahiro Maruyama, Tsutomu Sawano
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Keywords: polishing, polishing pad, glass, CMP
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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