Proceedings of JSPE Semestrial Meeting
2013 JSPE Spring Conference
Session ID : K15
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Host: The Japan Society for Precision Engineering

Deposition and Photovoltaic Characteristics of B-doped and Sb-doped Amorphous Carbon Films
*Kei Saito, Hiroaki Okuyama, Hiroki Akasaka, Naoto Ohtake
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Keywords: adamant, amorphous carbon, photovoltaic cell, CVD, magnetron sputtering, doping
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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