Evaluation of mechanical properties of Zr-Ni-Al metallic glass thin film

Abstract

Zr based metallic glass alloy has promising mechanical properties for MEMS applications although it has received little attention as a micro-material. We have tried to prepare the sample libraries of ZrNiAl alloy film using the combinatorial sputtering method for studying the compositional dependence on their crystallization temperature, hardness and Young′s modulus. Further investigations of their glass transition behavior including a micro formability are underway.