Proceedings of JSPE Semestrial Meeting
2013 JSPE Spring Conference
Session ID : K21
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Host: The Japan Society for Precision Engineering

Fluid Channel Forming on the Surface of Solid Materials by Laser Irradiation
*Wataru Shinohara, Yuko Aono, Atsushi Hirata, Hitoshi Tokura
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Keywords: laser modification, silicon, glass, fluid channel
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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