Proceedings of JSPE Semestrial Meeting
2013 JSPE Spring Conference
Session ID : K24
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Host: The Japan Society for Precision Engineering

Controlled crystal growth and composition ratio to make PZT high piezoelectric property
*Rikiya Takita, Kazuyoshi Tsuchiya, Yasutomo Uetsuji
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Keywords: PZT, Buffer layer, Sputtering, Hydrofluoric acid
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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