Proceedings of JSPE Semestrial Meeting
2013 JSPE Spring Conference
Session ID : L74
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Host: The Japan Society for Precision Engineering

Development of a differential air bearing screw ( 1st report: design process )
*Makoto Fukuda, Takeaki Nyuui
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Keywords: Air bearing screw, Differential screw, Precise positioning
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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