2014 JSPE Autumn Conference
Session ID : A22
Conference information
Host: The Japan Society for Precision Engineering
High-efficiency planarization of GaN and SiC by catalyst-referred etching applying ultra violet
*Wataru Yamaguchi, Ai Ishohashi, Takahito Sugiura, Tatsuaki Inada, Satoshi Matsuyama, Yasuhisa Sano, Kazuto Yamauchi
Author information
Keywords:
Gallium nitride,
Silicon carbide,
Planarization,
Catalyst,
Oxidation,
Photo-electrochemistry
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