Proceedings of JSPE Semestrial Meeting
2014 JSPE Autumn Conference
Session ID : A23
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Host: The Japan Society for Precision Engineering

Investigation of alternative catalyst metals to platinum in the catalyst-referred etching
*Ai Isohashi, Tatsuaki Inada, Wataru Yamaguchi, Takahito Sugiura, Satoshi Matsuyama, Yasuhisa Sano, Kazuto Yamauchi
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Keywords: planarization, catalyst, platinum, silicon carbide, transition metal
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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