Proceedings of JSPE Semestrial Meeting
2014 JSPE Autumn Conference
Session ID : A24
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Host: The Japan Society for Precision Engineering

Pattern Shape Control of PSS by Using Polishing Process
Relationship between Pattern Shape and LED performance
*Natsuko Aota, Hideo Aida, Yuki Kawamata, Yutaka Kimura
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Keywords: Patterned sapphire substrate, Ga lium nitride, Light emitting diode, Internal quantum efficiency, Light extraction efficiency
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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