Proceedings of JSPE Semestrial Meeting
2014 JSPE Autumn Conference
Session ID : A37
Conference information

Host: The Japan Society for Precision Engineering

Influence of various modelling on prediction accuracy in polishing pressure simulation
*Yohei Hashimoto, Norikazu Suzuki, Yue Shen, Eiji Shamoto
Author information
Keywords: CMP, polishing pressure, modelling, finite element analysis, non-linear viscoelasticity, material removal rate
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (944K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2014 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top