Proceedings of JSPE Semestrial Meeting
2014 JSPE Autumn Conference
Session ID : A36
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Host: The Japan Society for Precision Engineering

Research of agent-assisted oxidation polishing of single-crystal silicon carbide III
Makoto Satou, *Wataru Omori, Maiko Takahashi, Takaya Yamaguchi
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Keywords: polishing, chemical mechanical polishing, silicon carbaide, oxidizing agent
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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