Proceedings of JSPE Semestrial Meeting
2014 JSPE Autumn Conference
Session ID : H38
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Host: The Japan Society for Precision Engineering

Fabrication of micro segment-structured DLC film with electron beam lithography
*Yumi Yoshida, Yoshinao Iwamoto, Makoto Matsuo, Hiroki Akasaka, Naoto Ohtake
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Keywords: DLC, segment structure, electron beam lithography
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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