Proceedings of JSPE Semestrial Meeting
2014 JSPE Autumn Conference
Session ID : H37
Conference information

Host: The Japan Society for Precision Engineering

Deposition of a-BCN film by reactive magnetron sputtering
*Ryo Fujii, Kei Saito, Liza Kamis Shahira, Hiroki Akasaka, Naoto Ohtake
Author information
Keywords: BCN film coating, Magnetron sputter
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (452K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2014 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top