Proceedings of JSPE Semestrial Meeting
2014 JSPE Autumn Conference
Session ID : I08
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Host: The Japan Society for Precision Engineering

The Development of a High-Efficiency CMP Technology for Crustaceous Material With The Electrical Abrasive Control Technique
*Hiroshi Ikeda, Ryuta Nakamura, Takayuki Kusumi, Yoichi Akagami
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Keywords: slurry, CMP, Crustaceous Material, polishing rate, abrasive, electric field
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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