Proceedings of JSPE Semestrial Meeting
2014 JSPE Autumn Conference
Session ID : I09
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Host: The Japan Society for Precision Engineering

[title in Japanese]
*Nobuki Ozawa, Takehiro Aizawa, Kentaro Kawaguchi, Yuji Higuchi, Momoji Kubo
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Keywords: first-principles calculation, chemical mechanical polishing, α-Al2O3 substrate, silica abrasive grain
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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