2014 JSPE Spring Conference
Session ID : D02
Conference information
Host: The Japan Society for Precision Engineering
Design and Prototyping of Innovative CMP/P-CVM Combined Processing Machine(1st report)
Basic Concept and Prototype Machine
Keywords:
Chemical Mechanical Polishing,
Plasma Chemical Vaporization Machining,
Combined Processing Machine,
Hard-to-process materials,
Removal rate,
Surface roughness
Details
