Proceedings of JSPE Semestrial Meeting
2014 JSPE Spring Conference
Session ID : D03
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Host: The Japan Society for Precision Engineering

[title in Japanese]
*Kousuke Shiozawa, Yasuhisa Sano, Toshiro Doi, Shuhei Kurokawa, Hideo Aida, Tadakazu Miyashita, Haruo Sumizawa, Kazuto Yamauchi
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Keywords: atmospheric pressure plasma, mechanical machining, planarization
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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