Proceedings of JSPE Semestrial Meeting
2014 JSPE Spring Conference
Session ID : D21
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Host: The Japan Society for Precision Engineering

Influence of Slurry Flow on High Efficiency Polishing with a Small Tool
*Kenichiro Yoshitomi, Yousuke Hirai, Masaaki Mochida, Atsunobu Une
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Keywords: high efficiency polishing, polishing pad, planarization, slurry flow, removal rate
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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