Proceedings of JSPE Semestrial Meeting
2014 JSPE Spring Conference
Session ID : E18
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Host: The Japan Society for Precision Engineering

Fabrication and Characteristics of a Monolithically Micro Displacement Sensor
*Toshihiro Takeshita, Takuma Iwasaki, Kota Harisaki, Hideyuki Ando, Renshi Sawada
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Keywords: displacement sensor, thermal sensor, VCESL
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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