Nanometer Profile Measurement on Large Aspheric Optical Surface (10th Report)

Self Calibration of Autocollimator in Experiment Set up

Abstract

High accuracy aspheric mirrors and lenses with large dimension are widely used in the huge telescopes and other industry filed. But measuring method of large aspheric optical surface isn′t confirmed. The goal of our research is to measure the profile of large aspheric optical surface with accuracy of about 50 nm. We developed the autocollimator with CMOS as light receive element (CMOS type AC). In this report, we proposed self calibration method of sensitivity of autocollimator in experiment set up. We indicate the decrease the sensitivity error of CMOS type AC to ensure the effect of proposed method of Self calibration of autocollimator.