Proceedings of JSPE Semestrial Meeting
2014 JSPE Spring Conference
Session ID : H69
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Host: The Japan Society for Precision Engineering

Improvement of accuracy of atmospheric pressure plasma jet fine processing using a scanning nanopipette probe microscope
*Hiromitsu Sugimoto, Masaaki Nagatsu, Akihisa Ogino, Futoshi Iwata
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Keywords: atmospheric pressure plasma, nanopipette, shear force microscopy, fine processing, helium plasma, photoresist
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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