Proceedings of JSPE Semestrial Meeting
2014 JSPE Spring Conference
Session ID : H70
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Bottom Contact Ambipolar SWNT-FET Devices Using Flattened Electrodes
*Agung SetiadiMegumi AkaiAkira SaitoYuji Kuwahara
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Abstract
We have fabricated bottom contact CNT-FET devices on flattened electrodes. Our devices had larger numbers of CNT direct junctions compared to non-flattened devices due to stronger interaction between CNTs and modified SiO2 surfaces. Although all of our flattened and non-flattened devices showed ambipolar characteristic, flattened electrodes devices had better symmetry of transfer characteristic.
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© 2014 The Japan Society for Precision Engineering
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