Proceedings of JSPE Semestrial Meeting
2014 JSPE Spring Conference
Session ID : H74
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Host: The Japan Society for Precision Engineering

Observation of Adsorbed Water Films on Ultrathin Oxides by in-situ XPS
Comparison between GeO2 and SiO2
*Kenta Arima, Yoshie Kawai, Yuya Minoura, Kentaro Kawai, Takuji Hosoi, Mizuho Morita, Heiji Watanabe, Zhi Liu
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Keywords: wetting property, in situ XPS, oxide, germanium, silicon
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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