Proceedings of JSPE Semestrial Meeting
2014 JSPE Spring Conference
Session ID : A74
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Host: The Japan Society for Precision Engineering

Dimensional Measurement of Microstructures by Using a Nanopipette Ball Probe
*So Ito, Issei Kodama, Wei Gao
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Keywords: Nanopipette probe, Dimensional measurement, Tactile probing, Shear-force detection, Coordinate measurement machine
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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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