2014 JSPE Spring Conference
Session ID : A75
Conference information
Host: The Japan Society for Precision Engineering
Development of a System for 3-D Micro Metrology Using an Ultra-Small Diameter Optical Fiber Probe
Optical Analysis and Evaluative Experiment Using the 1 μm Diameter Stylus Tip
*Hiroshi Murakami, Akio Katsuki, Takao Sajima, Takuya Suematsu, Narumi Tokuou, Mitsuyoshi Fukuda
Author information
Details
