Proceedings of JSPE Semestrial Meeting
2014 JSPE Spring Conference
Session ID : A75
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Development of a System for 3-D Micro Metrology Using an Ultra-Small Diameter Optical Fiber Probe
Optical Analysis and Evaluative Experiment Using the 1 μm Diameter Stylus Tip
*Hiroshi MurakamiAkio KatsukiTakao SajimaTakuya SuematsuNarumi TokuouMitsuyoshi Fukuda
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CONFERENCE PROCEEDINGS FREE ACCESS

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[in Japanese]
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© 2014 The Japan Society for Precision Engineering
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