Proceedings of JSPE Semestrial Meeting
2016 JSPE Spring Conference
Session ID : C20
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Host: The Japan Society for Precision Engineering

A simple 3D shape estimation of through-silicon via (TSV) by a nano-focus x-ray projection image
*Yasutoshi Umehara, Nobuyuki Moronuki
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Keywords: TSV, X-ray, Transmission image, modeling of shapes, nano-focus
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[in Japanese]
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© 2016 The Japan Society for Precision Engineering
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