Development of Digital Acoustic Emission Sensor used by LiNbO3

(1st Report) Simulation of Si LiNbO3 Piezoresistive Cantilever Array

Abstract

Instead of a MEMS-type acoustic emission sensor having a complicated structure is had using expensive semiconductor devices, In this study a high-performance acoustic comb type AE sensor using a LiNbO3 material which can be a simple structure to be able to relatively inexpensive to manufacture is developed. This report is primarily to report on the design and simulation method and outline of the acoustic-com type AE sensor.