Development of Digital Acoustic Emission Sensor used by LiNbO3 (2nd Report)

Fabrication Method of LiNbO3 integrated Cantilever Array

Abstract

Instead of a MEMS-type acoustic emission sensor having a complicated structure is had using expensive semiconductor devices, In this study a high-performance acoustic comb type AE sensor using a LiNbO3 material which can be a simple structure to be able to relatively inexpensive to manufacture is developed.This report mainly report on the production and the process of its acoustic-com type AE sensor.