Proceedings of JSPE Semestrial Meeting
2016 JSPE Spring Conference
Session ID : A02
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Host: The Japan Society for Precision Engineering

Analysis of chemical polishing action in Cu-CMP with reactive nanoparticles using Raman spectroscopy enhanced by surface plasmon
*Masafumi Asahi, Yasuhiro Takaya, Yasuhiro Mizutani
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Keywords: Raman spectroscopy, Surface plasmon, CMP, Fullerenol, Nanodiamond
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[in Japanese]
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© 2016 The Japan Society for Precision Engineering
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