Proceedings of JSPE Semestrial Meeting
2016 JSPE Spring Conference
Session ID : E73
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Host: The Japan Society for Precision Engineering

High-efficiency planarization of SiC by catalyst-referred etching using photo-electrochemical oxidation
*Tatsuaki Inada, Ai Isohashi, Yasuhisa Sano, Kazuto Yamauchi
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Keywords: Planarization, Silicon carbide, SiC, Photo-electrochemical oxidation, Catalyst referred etching, CARE
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[in Japanese]
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© 2016 The Japan Society for Precision Engineering
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