Proceedings of JSPE Semestrial Meeting
2016 JSPE Spring Conference
Session ID : E69
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Host: The Japan Society for Precision Engineering

Effectiveness Evaluation of Polishing Pad Conditioning Method by Flexible Fiber Conditioner
*Naoki Takahashi, Michio Uneda, Yutaro Arai, Takashi Fujita
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Keywords: Conditioning, Fiber Conditioner, Removal Rate, Asperity, Polyetheretherketone
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[in Japanese]
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© 2016 The Japan Society for Precision Engineering
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