2016 JSPE Spring Conference
Session ID : H76
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Host: The Japan Society for Precision Engineering
The piezoelectric MEMS process monitor as an index of the piezoelectric properties of the AlN thin films
*Natsumi Makimoto, Ryohei Takei, Tatsuo Tabaru, Morito Akiyama, Takeshi Kobayashi, Toshihiro Ito
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