Proceedings of JSPE Semestrial Meeting
2016 JSPE Spring Conference
Session ID : J01
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Host: The Japan Society for Precision Engineering

Improvement of adhesion of amorphous carbon films by forming fine pores on substrate surface
*Shota Mizuta, Hao Zhang, Yuta Nishimura, Yuko Aono, Atsushi Hirata
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Keywords: amorphous carbon, thin film, fine pore, adhesion, friction, wear
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[in Japanese]
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© 2016 The Japan Society for Precision Engineering
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