Proceedings of JSPE Semestrial Meeting
2016 JSPE Spring Conference
Session ID : J08
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Host: The Japan Society for Precision Engineering

Smoothing of Hole Bottom Surface by Large-area Electron Beam Irradiation
*Hao Liu, Masashi Takata, Togo Shinonaga, Akira Okada, Motohiro Inoue
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Keywords: Large-area Electron Beam, Surface Smoothing, Hole Bottom Surface, Non-magnetic Material, Magnetic Material
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[in Japanese]
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© 2016 The Japan Society for Precision Engineering
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