Precision profile measurement for small aspheric optical surface by an multi-beam angle sensor

Abstract

The small aspheric surface has been widely used in many fields, such as mobile phone lens. There are high demands for measuring the surface precisely. Three conventional methods, Interferometry method, Displacement sensor method, Slope sensor method, have trouble in the point of accuracy, efficiency and profile limitation. This study proposes the method that is independent on these three troubles and new sensor for this experiment. New sensor detects angle by multi-beam, and this paper proposes new measuring instrument that can measure surface with micrometer scales accuracy.