2017 JSPE Autumn Conference
Session ID : G68
Conference information
Host: The Japan Society for Precision Engineering
Name : 2017 JSPE Autumn Conference
Location : [in Japanese]
Date : September 20, 2017 - September 22, 2017
[title in Japanese]
*Ken Emori, Yuji Okubo, Katsutoshi Endo, Hideaki Yamada, Akiyoshi Chayahara, Yoshiaki Mokuno, Kazuya Yamamura
Author information
Keywords:
Plasma,
Diamond,
Polishing,
Plasma Assisted Polishing,
Subsurface Damaged Layer,
Damage Free
Details
